| 摘要 |
FIELD: optical projection systems. SUBSTANCE: MxN matrix of thin-film driven mirrors has active matrix, substrate with MxN matrix of connection terminals, and MxN matrix of transistors, and MxN matrix driven structures. Driven structure operates in two modes and comprises second thin- film electrode, lower member, which is driven by electric signal, intermediate thin-film electrode, upper member, which is driven by electric signal, and first thin-film electrode. Another claim of invention discloses method which involves generation of active matrix, application of thin-film protection layer over active matrix, application of second thin-film layer over first one, selective removal of second thin-film layer, deposition of lower layer, which is driven by electric signal, application of intermediate electrode layer, deposition of upper layer, which is driven by electric signal, generation of first thin-film electrode layer. This results in production of multilayer structure, which is embedded into MxN matrix of half-finished driven structures. Then thin-film protection layer is removed. EFFECT: elimination of high-temperature processing for manufacturing of optical projection system. 11 cl, 17 dwg |
