| 摘要 |
<p>PROBLEM TO BE SOLVED: To stably detect a prealignment mark of a groove shape made in a wafer to attain high-speed, accurate prealignment. SOLUTION: This semiconductor aligner or semiconductor manufacturing apparatus includes a light projecting means 3 for projecting one-dimensional straight-line shaped collimated light extending in the radial direction of a disk- shaped wafer 1 onto a prealignment mechanism part, a light receiving means 4 for detecting the light flux reflected or scattered by the wafer 1, and a means for moving the wafer 1 which has a prealignment mark made therein.</p> |
