OPTICAL POSITION DETECTOR,申请号JP19980165011-传众专利搜索

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发明名称	OPTICAL POSITION DETECTOR
摘要
申请公布号	JPH11351818(A)	申请公布日期	1999.12.24
申请号	JP19980165011	申请日期	1998.06.12
申请人	HITACHI LTD	发明人	SHIMIZU HITOSHI;YAMADA KIMIO
分类号	G01B11/00;H01L31/02;(IPC1-7):G01B11/00	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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