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发明名称
APPARATUS AND METHOD OF INSPECTING DEFECTS
摘要
申请公布号
JPH11351849(A)
申请公布日期
1999.12.24
申请号
JP19980163639
申请日期
1998.06.11
申请人
CANON INC
发明人
HARUYAMA KOJI
分类号
G01B11/30;G01N21/88;(IPC1-7):G01B11/30
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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