| 摘要 |
PROBLEM TO BE SOLVED: To provide a three dimensional acceleration sensor having both a wide dynamic range and high detection accuracy and capable of being miniaturized. SOLUTION: Magnetic material 4 of a mass point, whose axis line is included on the Z-axis of orthogonal space axes of coordinates of X, Y and Z, is installed on a vibrator 2b having a three dimensional degree of freedom, and four or more detecting elements 5a, 6a, 7a, 8a, located on the X-axis and the Y-axis, and having centers respectively on a concentric circle around the origin of the axes of coordinates, are arranged. Based on the change of magnetic field strength from the magnetic material 4, the acceleration in the X-axis direction is detected by a relative difference between output voltages of the two detecting elements 5a, 6a on the X-axis, and the acceleration in the Y-axis direction is detected by a relative difference between output voltages of the two detecting elements 7a, 8a on the Y-axis, and the acceleration in the Z-axis direction is detected by the total of output voltages of all detective elements 5a, 6a, 7a, 8a, respectively. |
