| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and high-sensitivity tuning-fork type piezoelectric gyro sensor. SOLUTION: In a tuning-fork type piezoelectric sensor, one or a plurality of layers of internal electrodes 18 are provided in parallel with the surface of a piezoelectric ceramic tuning fork, and the internal electrodes 18 are sintered in one piece along with the piezoelectric ceramic tuning fork as in a method for manufacturing a lamination ceramic capacitor. The internal electrodes 18 are provided inside the piezoelectric body, an effective electromechanical coupling coefficient is increased, and the width of the electrodes 18 is set to 1/2 or less of the width of an arm 22 for detection so that the bending of electric field can be reduced. |
