SEMICONDUCTOR THIN FILM AND SEMICONDUCTOR DEVICE,申请号JP19980152316-传众专利搜索

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发明名称	SEMICONDUCTOR THIN FILM AND SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH11354442(A)	申请公布日期	1999.12.24
申请号	JP19980152316	申请日期	1998.05.15
申请人	SEMICONDUCTOR ENERGY LAB CO LTD	发明人	OTANI HISASHI;YAMAZAKI SHUNPEI;KOYAMA JUN;OGATA YASUSHI;MIYANAGA SHOJI
分类号	H01L21/20;H01L21/336;H01L29/786;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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