COMPONENT ANALYZING APPARATUS AND METHOD AND FOREIGN MATTER ANALYZING SYSTEM

摘要

PROBLEM TO BE SOLVED: To improve analytical accuracy by enhancing the detection sensitivity of generated energy in an apparatus for detecting generated energy by irradiating the position of the foreign matter component on the surface of a sample with energy beam, in order to analyze the foreign matter component. SOLUTION: When the surface of a sample 12 is irradiated with an energy beam, the operation of a relative moving means 14 is controlled by an operation control means 21, so as to apply energy beam to the position displaced in the direction of an energy detection means from a data setting position. Since foreign matter becomes a protruded part to cut off the energy generated, energy beam is applied to the position approaching the energy detection means 18, without irradiating the position centering around the foreign matter to enhance the detection sensitivity of generated energy.