| 摘要 |
<p>PROBLEM TO BE SOLVED: To automatically restrain a movement range for avoiding contact of a sample with device constituting members and to use a charged particle beam irradiating apparatus safely and easily by restraining the movement range of a sample moving mechanism, based on at least one piece of information such as position, size and shape of the sample in the height, width and depth directions. SOLUTION: An insertion amount measurement means 13 measures movement amounts in the insertion direction of a sample 6 and a sample table 7 to be inserted into a sample chamber 4. The sample 6 and the sample table 7 are passed through a sample measurement means 11 to measure their heights and dimensions in the planar direction, dimensions Xs, Ys, Zs of the sample 6 and dimensions Xc, Yc, Zc of the sample table 7 are stored in a memory, and a control device 16 calculates the driving range of a sample moving mechanism 9, within which the sample 6 and the sample table 7 can move without abutting on an objective lens 2, detector 20 or the like based on them. The limit values X1, Y1 and Z1 are defined and stored in the memory 19. A sample table drive-controlling means compares the present position of the sample moving mechanism 9 with the drive limiting values in the memory 19 and stops the driving, if it exceeds the drive limiting values.</p> |
