| 摘要 |
PROBLEM TO BE SOLVED: To increase capacitance by augmenting the area of a lower electrode without changing the thickness of a bathtub type stacked capacitor. SOLUTION: An insulating film having voids V on the inside is used as an insulating film 11, to which a recessed section 12 constituting a bathtub is formed. When the recessed section 12 is formed by etching, etc., the voids V are exposed to the surface of the sidewall of the recessed section, and fine indentations 13 are formed. The substantial area of a lower electrode 22 is increased by forming the lower electrode 22 so as to be fast stuck even to the indentations. |
