| 摘要 |
PROBLEM TO BE SOLVED: To evenly and stably form a coated film on the surface of a substrate with less coating liquid by accelerating the rotation of the substrate based on the fact that the coating liquid become a specific shape. SOLUTION: Prior to a coating liquid supplied to a substrate W from a supply nozzle 5 extends to a peripheral part to cover the entire surface of the substrate W, the rotation of the substrate W is accelerated by a motor 3 to form a coated film. Here, a CCD camera 25 for imaging the surface of the substrate W, an image memory where the shape of the coating liquid at a specific time point prior to the entire surface of the substrate W being covered with the coating liquid is imaged in advance and stored as a specific shape before processing an image processing part, wherein at processing, so as to discriminate that the shape of coating liquid at processing agrees with the specific shape stored in the image memory, and a control part 20 which controls for starting the acceleration with the motor 3 when the shapes agree each other, are provided. |
