| 摘要 |
PROBLEM TO BE SOLVED: To provide an abnormality detection method of a flow rate sensor which can eliminate the need for a special detection sensor and a detection circuit by enabling judgment of the abnormality of the flow rate sensor, for example, adhesion of a drain to a sensor chip, based on the output state of the sensor. SOLUTION: A high flow rate sensor 31 determines that a low flow rate sensor operates abnormally when it is confirmed for given times that an absolute value of an output difference between sensor outputs of a pair of temperature sensors 21 and 22 as the low flow rate sensor with respect to a detectable specified flow rate and default values of the pair of temperature sensors 21 and 22 with respect to the specified flow rate exceeds an allowable valueα.
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