| 摘要 |
PROBLEM TO BE SOLVED: To avoid a fluctuation in a deposited layer on the basis of generation of an alternating magnetic field in a microwave. SOLUTION: A single rod-shaped conductor 4 is guided by penetrating through a vacuum chamber 3 on the inside of a single insulating tube 5, an inside diameter of the insulating tube 5 is formed larger than a diameter of the conductor 4, the insulating tube 5 is held by a wall 6 of the vacuum chamber 3 at least in one end part, the outside surface of the insulating tube 5 is sealed to the wall, the conductor 4 is connected to a first source 8 for generating an alternating magnetic field at least in one end part, a range of the part where the rod- shaped conductor 4 extends by rushing in the vacuum chamber 3 is molded as a spiral body 2, and here, the winding length L of the part is set to L=C/cos (α) in a wave length λo=10 deg.<α<15 deg.. |
