| 摘要 |
PROBLEM TO BE SOLVED: To provide a homogenizer device with a beam rotation function capa ble of homogenizing the beam under the condition where the beam is rotated by an arbitrary angle, and a laser beam machining device using it. SOLUTION: When a laser beam is rotated by an angleθaround an axle line C1 substantially parallel to an incident beam B0, this homogenizer device has a beam rotating optical element 10a for rotating an outgoing beam B1 around the beam axis by 2θ, a homogenizer element 11 on which the outgoing beam B1 from the beam rotating optical element 10a is made incident, and a homogenizer element rotation control device 10b. Thus, when the beam rotating optical element 9 is rotated byθ, the homogenizer element 11 is rotated by 2θaround the beam axis C2 of the incident beam B1.
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