| 摘要 |
PROBLEM TO BE SOLVED: To reduce the offset of a detection signal being generated due to the unneeded vibration of a vibrator and its temperature drift in an angular velocity sensor for detecting an angular velocity using the vibrator consisting of a piezoelectric body in the shape of a tuning fork or in a shape where a plurality of tuning forks are combined. SOLUTION: In an angular velocity sensor with a vibrator 2 in the shape of a tuning fork consisting of a piezoelectric body, the vibrator 2 is excited and vibrated in the direction of a drive axis via a self-excitated oscillation circuit 40 and a ridge near the root of the vibrator 2 for greatly affecting the vibration characteristics of the vibrator 2 is trimmed so that a detection signal (offset) obtained via a detection circuit 50 at that time (when no angular velocity is inputted) can be reduced. Also, the ridge to be trimmed is determined by inputting a reference signal Vr for indicating the actual vibration state of the vibrator 2 and a detection signal to a locking amplifier 60 and detecting the phase relationship for the reference signal Vr of the detection signal, thus achieving an angular velocity sensor for efficiently adjusting the vibration characteristics of the vibrator 2 and for accurately detecting an angular velocity. |
