发明名称 OPTICAL MODULATOR
摘要 PROBLEM TO BE SOLVED: To provide an optical modulator which optically modulates a high power laser beam at high speed. SOLUTION: Based on driving signal S1 , a piezo element 53 vibrates a diaphragm 54c of which one end is fixed and the other end is free. The surface of the diaphragm 54c includes a reflecting plane 54d, and the reflecting plane 54d changes an angle of reflecting the laser beam toα1 orα2 according to the vibration of the diaphragm. When the laser beam reflected by the reflecting plane 54c has a predetermined angleα2 , a selective passing part 55 selectively takes out the laser beam, which is optically modulated accordingly.
申请公布号 JPH11352423(A) 申请公布日期 1999.12.24
申请号 JP19980163593 申请日期 1998.06.11
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 OGAWA HIDEAKI
分类号 G02B26/08;(IPC1-7):G02B26/08 主分类号 G02B26/08
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