摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus, which can efficiently transfer substrates according to the number of substrates and also to provide a substrate processing apparatus using the transfer apparatus. SOLUTION: A horizontal transfer robot 200 can be exchanged by removing and attaching single-wafer hands 260a and 260b for holding a single sheet of W to a third arm 225 as well as a batch hand 250, for collectively holding a plurality of sheets of substrates W thereto. When the plural sheets of substrates W are collectively transferred between a carrier C and an attitude conversion mechanism 300, the substrates are transferred by the batch hand 250. When the substrates W are transferred one by one therebetween or when the substrates W are rearranged within the carrier C or within the attitude conversion mechanism 300, the substrates W are transferred one by one by the single-wafer hands 260a and 260b. |