发明名称 SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE PROCESSING APPARATUS USING THE SUBSTRATE TRANSFER APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a substrate transfer apparatus, which can efficiently transfer substrates according to the number of substrates and also to provide a substrate processing apparatus using the transfer apparatus. SOLUTION: A horizontal transfer robot 200 can be exchanged by removing and attaching single-wafer hands 260a and 260b for holding a single sheet of W to a third arm 225 as well as a batch hand 250, for collectively holding a plurality of sheets of substrates W thereto. When the plural sheets of substrates W are collectively transferred between a carrier C and an attitude conversion mechanism 300, the substrates are transferred by the batch hand 250. When the substrates W are transferred one by one therebetween or when the substrates W are rearranged within the carrier C or within the attitude conversion mechanism 300, the substrates W are transferred one by one by the single-wafer hands 260a and 260b.
申请公布号 JPH11354604(A) 申请公布日期 1999.12.24
申请号 JP19980157930 申请日期 1998.06.05
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 MITSUYOSHI ICHIRO
分类号 H01L21/677;H01L21/304;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/677
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