发明名称 METHOD AND DEVICE FOR GENERATING HARMONICS OF LASER BEAM, AND METHOD AND DEVICE FOR EXPOSURE
摘要 PROBLEM TO BE SOLVED: To provide a harmonic generating device for generating harmonics of high efficiency, long life and stability. SOLUTION: A harmonics generating device for laser beam comprises a laser light source 1 for generating a laser beam(LB), a harmonics generating means 4 which generates harmonics of the laser beam LB when laser beam 1 is projected, an optical path displacement means 2 provided between the laser light-source 1 and the harmonics generating means 4 for allowing movements, makes the optical path of laser beam LB displaced in a direction almost vertical with respect to the optical path of the laser beam LB, while the rotation angle of the harmonics generating means 4 to the laser beam LB is maintained in this state.
申请公布号 JPH11354439(A) 申请公布日期 1999.12.24
申请号 JP19990140021 申请日期 1999.05.20
申请人 NIKON CORP 发明人 ISHIZAKA SHOJI;HARA HIDEO;ICHIHARA YUTAKA
分类号 H01L21/027;G03F7/20;H01S3/109;H01S3/227;(IPC1-7):H01L21/027 主分类号 H01L21/027
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