| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer apparatus and a semiconductor manufacturing apparatus, which can eliminate the need for additional facilities such as a lift, and can readily and collectively exchange arms including a carrier without losing an origin position, with superior maintainability and workability. SOLUTION: In a frog-leg shaped transportation apparatus, an arm restricting pin 5 for restricting the relative position of a pair of first arms 4a and 4b at an origin position is inserted into the first arms 4a and 4b. Then an origin restriction pin for restricting relative postions of one of the pair of the arms 4a and 4b and driving shafts 8a and 8b to thereby remove a fixing screw tightly coupling, together the pair of the first arms 4a and 4b and the respective driving shafts 8a and 8b. |
