| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a positioning equipment of an object to be inspected which can position an object to be inspected like a semiconductor chip at a desired position without applying an excessive force, and a positioning method of the object to be inspected. SOLUTION: A flat working surface 11, a position regulating plate 13 having a rectangular hole part 12 capable of including an object 20 to be inspected, and a position regulating plate moving means 14 which can move the position regulation plate 13 in an arbitrary direction of an arbitrary distance in a specified plane which is parallel with the working surface 11, and those gap the flat working surface 11 is smaller than the thickness of the object 20 to be inspected are installed. When the position regulating plate 13 is moved in a specified order by the position regulating plate moving means 14, the object 20 to be inspected which is mounted on the working surface 11 in the hole part 12 is pushed and moved by the inner peripheral edge of the hole part 12 and positioned at a specified position without being applied large stress.</p> |
