发明名称 METHOD AND DEVICE FOR BONDING WIRE AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve the connection intensity of bonding in ball bonding. SOLUTION: A capillary 3 where a wire guide hole 3c is formed inside and recessed parts 3b being thin annular grooves are formed at tip faces 3a pressurizing the wire connection part of a wire at the time of bonding and a bonding processing part bonding the wire by the capillary 3 are provided. At the time of pressurizing the wire connection part by the capillary 3 and bonding the wire, wire side projection parts are formed in the wire connection part by the thin annular recessed parts 3b in the tip face 3a of the capillary 3, and the wire connection part is pressurized.
申请公布号 JPH11354569(A) 申请公布日期 1999.12.24
申请号 JP19980156925 申请日期 1998.06.05
申请人 HITACHI LTD 发明人 MATSUNAGA TOSHIHIRO;TSUTSUMI YASUKI
分类号 H01L21/60 主分类号 H01L21/60
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