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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11354655(A)
申请公布日期
1999.12.24
申请号
JP19980164944
申请日期
1998.06.12
申请人
NEC CORP
发明人
TSUKIJI MASARU
分类号
H01L21/8247;H01L21/28;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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