CASSETTE BOX DOOR OPENING/CLOSING DEVICE AND METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a device and method for opening and closing a cassette box door, which can prevent the damages of a cassette box or device even at abnormality times, can quickly restart the device which stopped in an emer gency, and can generate less dust upon opening or closing the door of the cas sette box for use in transfer or storage of a semiconductor wafer. SOLUTION: Latching pins 13a and 13b for fixing a device body 11 and a cassette box door 3 are provided freely movably in its longitudinal direction. The pins are provided on their one ends with means 16a and 16b for detecting the absence of the door 3 and in the vicinity of the other ends with means 18a and 18b for detecting the fitting of the latching pins. A positional relation between the cassette box and device body 11 is always comprehended for safe opening and closing of the door 3. Since contacting between the door 3 and body 11 is carried out only by the latching pins 13a and 13b, less dust is generated than in the case when register pins are used.