| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide shape measuring equipment which can simply measure a complex three-dimensional shape including a free curved surface of an object to be measured with high precision, irrespective of conductor or non-conductor. SOLUTION: When an object 4 to be measured is moved in the vertical direction Z with an X-Y-Z stage 6, the object 4 to be measured is brought into contact with the tip part 7d of a probe 7, which is deflected. An image processing part calculates a specified feature parameter from an image of the probe 7 sensed by an optical microscoope 9. A contact judging part judges contact and existence of sticking, on the basis of the specified feature parameter calculated by the image processing part. A total controlling part controls the X-Y-Z stage 6, scans the surface of the object 4 to be measured in the vertical direction Z and the horizontal directions X, Y, and obtains a three-dimensional coordinates of the surface of the object 4 to be measured on the basis of the judged results of the contact judging part.</p> |
