| 摘要 |
PROBLEM TO BE SOLVED: To obtain a compact angular velocity sensor that performs evacuation while appropriately maintaining alignment accuracy and can be manufactured with improved yield. SOLUTION: An exhaust hole 8 and an exhaust groove 9 are provided at either of substrates 1 and 5 for constituting a sensor, the substrates 1 and 5 are subjected to anode joint, air inside the sensor is evacuated through the exhaust hole 8 and the exhaust groove 9, and the exhaust hole 8 and the exhaust groove 9 are closed by a thin film 10 such as a metal film and an insulation film, a low-melt-point glass material, a metal material such as solder, a silicon wafer, and the like after evacuation, thus performing the vacuum sealing of the sensor. |
