TARGET MATERIAL FOR SPATTERING

摘要

A target for spattering comprising a noble metal, characterized in that it has a columnar crystal texture which grows in the normal direction to a spattering plane. The target is free from the occurrence of the problem that a fine block in a cluster form is missed from a target, which problem is likely to occur in a target for spattering obtained by using the dissolution casting method or the powder metallurgy method, and can be used for producing a thin film having good film properties, and further is a high purity noble metal target for spattering having little internal defect.