STATIC PRESSURE GAS BEARING, STAGE DEVICE USING IT, AND OPTICAL DEVICE USING IT

摘要

A static pressure gas bearing, stage device, and optical device, in which a gas layer is provided between relatively movable two members (fixed part and movable part) and maintained at a specified distance; specifically, a static pressure gas bearing, a stage device, and an optical device capable of reducing the size of devices and easily laying out piping, wherein the static pressure gas bearing comprises a fixed part (4) and a movable part (3) installed movably along the fixed part (4) and a space between the fixed part (4) and the movable part (3) is maintained at a specified distance by the gas layer between the fixed part (4) and the movable part (3), the movable part (3) comprises bearing pads (3a) to feed gas into the gas layer between the movable part (3) and the fixed part (4) and discharge grooves (3c) to discharge gas fed by the bearing pads (3a), and the fixed part (4) comprises discharge ports (4a) provided at positions opposite to the discharge grooves (3c).