TRANSMISSION ELECTRON MICROSCOPE CCD CAMERA

摘要

In order to improve the performance of a CCD camera (12) on a high voltage electron microscope, an electron decelerator (14) is inserted between the microscope column and the CCD (12). This arrangement optimizes the interaction of the electron beam with the scintillator (46) of the CCD camera (12) while retaining optimization of the microscope optics and of the interaction of the beam with the specimen. Changing the electron beam energy between the specimen and camera allows both to be optimized.