发明名称 |
Vorrichtung zur Abstützung des Taragewichtes |
摘要 |
A tare supporting apparatus supports the tare of a structure required to have very high surface precision, without affecting the surface precision of the structure. For that, the tare supporting apparatus comprises a driving unit for moving a driven body in the direction of gravity with respect to a base, and a supporting unit for supporting the tare of the driven body at a position after driven, wherein the driving unit and supporting unit are so arranged that a drive force of the driving unit and a support force of the supporting unit are on a same axis. <IMAGE> |
申请公布号 |
DE69419688(T2) |
申请公布日期 |
1999.12.23 |
申请号 |
DE1994619688T |
申请日期 |
1994.09.30 |
申请人 |
CANON K.K., TOKIO/TOKYO |
发明人 |
AKUTSU, KOTARO;OSANAI, EIJI;KAMATA, SHIGETO |
分类号 |
B23Q1/00;B23Q1/26;B23Q1/38;F16C29/02;F16C32/06;G03F7/20;H01L21/027;H01L21/68;H01L21/687 |
主分类号 |
B23Q1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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