| 摘要 |
<p>A method for preparation of a target material for spattering, which comprises precipitating a noble metal or a noble metal alloy by electrolyzing a mixed molten salt comprising a noble metal salt and a solvent salt. The inventive method allows the simplification of a production process and also the production of a target material of high purity. Further, a target material having a markedly high purity can be prepared by subjecting the noble metal or noble metal alloy obtained by electrolytic precipitation to a heat treatment at a temperature higher than 800 °C and not higher than the melting point of the noble metal.</p> |
