| 摘要 |
A multi-channel faceplate (200), that in some embodiments is monolithic, is provided as a portion of a gas delivery system to a process chamber (100). At least two sets of gas pathways are disposed through a faceplate and allow for independent delivery of separate gases into a process chamber (100). In one embodiment, a first gas pathway, which includes a first set of vertical channels (226), is formed through the faceplate (200). A second gas pathway includes a second set of vertical channels (228), which is formed through a portion of the faceplate and connected to a set of interconnecting horizontal channels (222) in the faceplate (200), where the second gas pathway maintains fluid separation from the first gas pathway, prior to the gases entering the process chamber (100).
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