发明名称 HIGH STABILITY SPIN STAND PLATFORM
摘要 <p>Spin stand platform having split axes. The platform includes an air bearing spindle stage (16) supporting a test disk and constrained for motion in a plane on a surface along a first axis. A micropositioning stage air bearing (12) is provided which is constrained for motion in the plane on the surface along a second axis orthogonal to the first axis and the micropositioning stage is adapted to support a read head element under test. First and second actuators move the stages to desired locations. At the desired location, apparatus removes air from the air bearings to lock-down the stages to the surface at the desired locations. It is preferred that the air bearings be vacuum preloaded and that linear motors be used to move the stages.</p>
申请公布号 WO1999066498(A1) 申请公布日期 1999.12.23
申请号 US1999013440 申请日期 1999.06.15
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