发明名称 |
Photographic mask material and mask, useful in printed circuit and liquid crystal display manufacture |
摘要 |
Photographic mask material has a transparent glass substrate with a layer containing physical development nuclei covered by a light-sensitive layer containing silver halide. Independent claims are also included for: (a) a method of making the mask material by coating the substrate with a liquid containing physical development nuclei and then with a silver halide emulsion; (b) photomasks with a light-screening silver pattern formed by the action of the physical development nuclei on the silver halide during processing; and (c) a method of making a photomask by selective exposure of the light-sensitive layer of the mask material to form a latent image nucleus in the silver halide in the exposed area; followed by reduction and removal of the silver halide in the unexposed area to form a silver film of predetermined pattern on the first layer by the action of the physical development nuclei; and removal of the light-sensitive layer.
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申请公布号 |
DE19927995(A1) |
申请公布日期 |
1999.12.23 |
申请号 |
DE1999127995 |
申请日期 |
1999.06.18 |
申请人 |
MITSUBISHI PAPER MILLS LIMITED, TOKIO/TOKYO |
发明人 |
TAKAOKA, KAZUCHIYO;KAWAI, NORIYUKI;HYODO, KENJI |
分类号 |
G03F1/12;G03F1/54;G03F7/07;(IPC1-7):G03F1/14;G03F7/06;G03F7/09 |
主分类号 |
G03F1/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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