| 摘要 |
The invention relates to a method for determining the distance P of an edge of a structural element (16) which is non-orthogonal in relation to the coordinate axes (x, y) of a substrate. The structural element (16) is represented on a detector array (13), having a reference point (14), of a charge-coupled device camera. By means of a measurement window (17) rotated at an angle THETA to the coordinate system, the distance PIPC of an edge of the structural element (16) relative to the reference point (14) is determined. The distance L of the reference point (14) to the origin of the coordinate system is determined via the angle THETA and the current measuring table coordinates (x, y) so that the distance P is obtained by P = PIPC + L, where L = x•cos THETA y•sin THETA .
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