发明名称 SCINTILLATOR PLATE, RADIATION IMAGE SENSOR, AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>Scintillators (12) having a columnar structure are formed on the photodetecting face of a photodiode array (10) of a radiation image sensor. An Al film (light-absorbing film) (14) is provided on the surface of the end portion of each scintillator (12), excepting the scintillators (12) in photodetecting sections (10b). A first polyparaxylene film (16) for improving moisture resistance is provided to cover the whole scintillators (12), and an Al film (18) for improving moisture resistance is provided over the first polyparaxylene film (16). Further a second polyparaxylene film (20) for preventing separation of the Al film (18) is provided.</p>
申请公布号 WO1999066346(P1) 申请公布日期 1999.12.23
申请号 JP1999003262 申请日期 1999.06.18
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