POSITIVE PHOTORESISTS CONTAINING NOVEL PHOTOACTIVE COMPOUNDS,申请号EP19980912397-传众专利搜索

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发明名称	POSITIVE PHOTORESISTS CONTAINING NOVEL PHOTOACTIVE COMPOUNDS
摘要
申请公布号	EP0965067(A1)	申请公布日期	1999.12.22
申请号	EP19980912397	申请日期	1998.02.26
申请人	CLARIANT INTERNATIONAL LTD.	发明人	DURHAM, DANA, L;LU, PING-HUNG;OBERLANDER, JOSEPH, E.;KHANNA, DINESH, N.
分类号	C08K5/00;C08L61/06;C08L101/12;G03F7/004;G03F7/022;G03F7/039;H01L21/027;(IPC1-7):G03F7/004	主分类号	C08K5/00
代理机构		代理人
主权项
地址

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