Thin-film electron emitter device and application equipment using the same

摘要

A thin-film electron emitter device comes with a multilayer structure consisting of two, upper and lower electrodes with an insulative or dielectric layer being sandwiched therebetween. The upper or "top" electrode is structured from a sequential lamination of an interface layer, intermediate or "middle" layer and surface layer on or above the dielectric layer. The middle layer is made of a chosen material which is greater in sublimation enthalpy than the surface layer and yet less than the interface layer. When appropriate, the surface layer may be omitted providing two-layer structure rather than the three-layer structure.