发明名称 |
MANUFACTURE OF HIGH PRECISION ELECTRONIC COMPONENTS WITH ULTRA-HIGH PURITY LIQUIDS |
摘要 |
<p>Semiconductor wafers and other electronic parts which similarly require ultra-high purity manufacturing environments are treated with ultra-high purity liquid cleaning and etching agents prepared at the site of use from gaseous raw materials which have been purified to a level compatible with semiconductor manufacturing standards, combined when appropriate with ultra-pure water.</p> |
申请公布号 |
EP0693974(B1) |
申请公布日期 |
1999.12.22 |
申请号 |
EP19920915132 |
申请日期 |
1992.03.17 |
申请人 |
AIR LIQUIDE AMERICA CORPORATION |
发明人 |
CLARK, R., SCOT;BAIRD, STEPHEN, S.;HOFFMAN, JOE, G. |
分类号 |
B01D53/22;B08B3/14;H01L21/00;H01L21/02;H01L21/304;H01L21/306;(IPC1-7):B05C3/02;B05C3/109;B05C3/18;B05C5/00;B05C9/10;B05C11/10 |
主分类号 |
B01D53/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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