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发明名称
HOT PRESSED SILICON CARBIDE WAFER AND METHOD OF USING IT AS A DUMMY WAFER
摘要
申请公布号
EP0964839(A1)
申请公布日期
1999.12.22
申请号
EP19980908759
申请日期
1998.02.27
申请人
SAINT-GOBAIN INDUSTRIAL CERAMICS, INC.
发明人
HOLMES, THOMAS, M.;TOMANOVICH, JOHN, A.
分类号
C04B35/565;C04B35/575;C04B35/626;H01L21/02;(IPC1-7):C04B35/565;C30B29/36
主分类号
C04B35/565
代理机构
代理人
主权项
地址
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