发明名称 Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure
摘要 A zirconia diaphragm structure, and a method of producing such structure in which the zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-3.0% by weight of alumina, 0.1-3.0% by weight of silica, 0.1-5.0% by weight of alumina and silica, 0.1-5.0% by weight of alumina and magnesia, or 0.1-5.0% by weight of alumina, silica and magnesia.
申请公布号 US6004644(A) 申请公布日期 1999.12.21
申请号 US19960698765 申请日期 1996.08.16
申请人 NGK INSULATORS, LTD. 发明人 TAKEUCHI, YUKIHISA;MASUMORI, HIDEO;TAKEUCHI, KATSUYUKI;NANATAKI, TSUTOMU
分类号 C04B35/486;G01L7/08;H01L41/053;H01L41/09;(IPC1-7):B32B18/00 主分类号 C04B35/486
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