| 摘要 |
PROBLEM TO BE SOLVED: To generate a uniform and high-density plasma over a broad range. SOLUTION: A high voltage alternating electric field application power supply 12 is connected to mesh electrodes 11a, 11b arranged opposite to each other at a constant interval. The mesh electrodes 11a, 11b are coated with dielectrics 13a, 13b to constitute a plasma generation part. The dielectrics 13a, 13b are coated with zeolite 14a, 14b as a catalyst bearing inorganic ion exchanger. An alternating or a pulsed high voltage power supply is used as the high voltage alternating electric field application power supply 12. In the plasma generation device structured as described, the dielectrics 13a, 13b coating the mesh electrodes 11a, 11b receive an alternating high voltage and are polarized to generate an alternating high electric field between the plasma generation parts. Electrons accelerated and excited by the high electric field make a gas intended for treatment (environmental pollutants) in an area between the plasma generation parts a plasma. The gas is subjected to chemical actions such as oxidation, reduction and decomposition. |
