Integrated micro pressure-resistant flow control module

摘要

An integrated micro pressure-resistant flow control module in which, when a fluid enters the integrated module past a pressure-resistant fluid channel and a suspended microstructure into a thermally-driven microvalve zone, the latter utilizes heat actuation to drive a silicon microbridge with mesa to open a linear proportional flow microvalve. A pressure-resistant flow sensing unit is disposed before the fluid channel to sense the flow amount. The flow sensing unit has a micro-suspending arm of pressure-resistant material located vertically at the fluid entrance of the module. The momentum of the fluid is thereof vertical to the micro-uspending arm, and the flow value is obtained by the deflection of the micro-suspending arm which changes the resistance value. The sensing unit is synchronously made with the microvalve and the silicon microbridge structure in an integration process so as to reduce manufacturing steps and minimize the size of the module.