MANUFACTURE OF SEMICONDUCTOR SUBSTRATE, EXTERNAL SURFACE PROCESSING DEVICE, AND SINGLE CRYSTAL INGOT,申请号JP19980160899-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR SUBSTRATE, EXTERNAL SURFACE PROCESSING DEVICE, AND SINGLE CRYSTAL INGOT
摘要
申请公布号	JPH11348031(A)	申请公布日期	1999.12.21
申请号	JP19980160899	申请日期	1998.06.09
申请人	SUMITOMO METAL IND LTD	发明人	TOMITA SHINICHI
分类号	B28D5/04;C30B31/00;(IPC1-7):B28D5/04	主分类号	B28D5/04
代理机构		代理人
主权项
地址

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