FORMATION OF SILICA FILM,申请号JP19980153344-传众专利搜索

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发明名称	FORMATION OF SILICA FILM
摘要
申请公布号	JPH11350141(A)	申请公布日期	1999.12.21
申请号	JP19980153344	申请日期	1998.06.02
申请人	ASAHI GLASS CO LTD	发明人	AZUMA SEIJI
分类号	C23C16/42;H01L21/205;H01L21/31;(IPC1-7):C23C16/42	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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