| 摘要 |
A device for measuring and displaying selected characteristics (i.e., the intensity profile distribution, the shape and the width) of molecular and/or submolecular particle beams, such as ion or electron beams, in which the beam width may be of the order of 5 microns or less, is disclosed. The device comprises a thin wire (at least 10 mils in diameter) having a very narrow zone such as a thin groove (less than 5 microns wide) along a portion of its length. When there is relative movement between the beam and the wire so that the grooved portion of the wire is passed transversely through the beam, a secondary charged particle emission current dependent upon the beam intensity and angle of incidence with the wire surface is generated and displayed on an oscilloscope as a beam intensity profile. The width of the beam is a function of the width of that portion of the profile resulting from movement of the groove across the beam.
|
