VERTICAL LAMINAR-FLOW CLEAN ROOM OF FLEXIBLE DESIGN

摘要

A vertical laminar-flow clean room is contained within a bounding enclosure which is substantially airtight. The clean room floor is raised and has apertures therein. The floor and the bottom of the bounding enclosure form an air-receiving plenum. A dropped ceiling is formed of an assembly of blower-hood-filter units, with the space directly above the dropped ceiling constituting an air-supply plenum. Air return plenums are contained entirely within the bounding enclosure and preferably incorporate prefilters and air-conditioning equipment, and the air return plenums connect the air-receiving plenum to the air-supply plenum. The blower-hood-filter units and air return plenums are all of a similar size, in order to facilitate a modular-type of construction and flexibility of design.