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发明名称
PRODUCTION OF SILICON SINGLE CRYSTAL
摘要
申请公布号
JPH11349398(A)
申请公布日期
1999.12.21
申请号
JP19990057425
申请日期
1999.03.04
申请人
SHIN ETSU HANDOTAI CO LTD
发明人
IINO EIICHI
分类号
C30B29/06;(IPC1-7):C30B29/06
主分类号
C30B29/06
代理机构
代理人
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