| 摘要 |
PROBLEM TO BE SOLVED: To provide an aperture mask capable of reducing cost and shortening the time of delivery in the machining pattern formation on a print mask material, as well as providing an optical machining method and device therefor. SOLUTION: A plurality of card type aperture masks is used in which a light passing pattern is formed, corresponding to one of the plural element shapes that constitute a machining pattern to be formed on a print mask material 60. The device is provided with the plural aperture masks 40, cassettes 46, 47 for storing the aperture masks, a cassette driving mechanism including its controller as a means for selecting one aperture mask out of those masks 40 stored in the cassettes based on machining pattern information, a guide member 41 and a fixing member 42 for holding the aperture masks 40, an optical system which emits laser beams to the aperture masks 40 and which emits those beams passed through the aperture masks 40 to one irradiation section 60a on the print mask material 60, and driving means (X-Y table 63 and a driving system 64, for example) for driving the print mask material 60. |
