发明名称 |
Pressure sensor using elements operating with acoustic surface waves (saw elements) |
摘要 |
A pressure sensor with a reflective acoustic surface wave (SAW) delay line fashioned on a pressure-sensing membrane having at least three reflectors wherein the delay line extends over both an expanding region and a compressing region of the pressure-sensing membrane.
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申请公布号 |
US6003378(A) |
申请公布日期 |
1999.12.21 |
申请号 |
US19970928928 |
申请日期 |
1997.09.12 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
SCHERR, HOLGER;SCHOLL, GERD |
分类号 |
G01L9/00;H03H9/25;(IPC1-7):G01L11/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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