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摘要
申请公布号
JP2991388(B2)
申请公布日期
1999.12.20
申请号
JP19910214923
申请日期
1991.08.27
申请人
NIPPON DENKI KK
发明人
MATSUBARA SHINYA
分类号
H01L21/768;H01L21/302;H01L21/3065;(IPC1-7):H01L21/768;H01L21/306
主分类号
H01L21/768
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